| 摘要 |
PURPOSE: An inspection apparatus and an inspection method thereof of a semiconductor integrated circuit device are provided to realize the low cost and acceleration of inspection by comprising a selection circuit selectively outputting analogue voltages of 1 to n kinds out of analogue voltages of n kinds. CONSTITUTION: An input terminal(504) is connected to a distributing circuit(505) of a first stage. The distributing circuit of a first stage is connected to an input terminal of a DA converter(506) of an n-th stage. The output terminal of the DA converter is connected to an output terminal(503). The digital signal is supplied to the distributing circuit of a first stage from the input terminal.
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