IMPRINTING MASTER FABRICATING METHOD FOR ALIGNMENT OF POLYMER OPTICAL COUPLING DEVICE AND FABRICATING METHOD OF OPTICAL COUPLING DEVICE USING THE SAME

摘要

PURPOSE: A method for manufacturing an imprint master for arranging a polymer optical coupling device and a method for manufacturing an optical coupling device using the same are provided to secure the reliability of an optical coupling precision between an optical device and an optical fiber. CONSTITUTION: A structure of an optical coupling device mounting an optical device and an optical fiber and a plurality of unit mold with an align key are manufactured. A unit mold is imprinted on a polymer layer. A reproduced unit structure is manufactured. A unit structure is arranged on a flat plate. A guide pin(30) is inserted into an align key(46) and then the unit structure is fixed. The patterns of the optical coupling device are integrated on an imprint mold.