| 摘要 |
PURPOSE: A dicing device, a dicing device unit, and a dicing method thereof are provided to stabilize the equilibrium of the entire dicing device by arranging a work cutting processing part in the center of the dicing device. CONSTITUTION: A work table(24) mounts a work piece. A blade(25) cuts the work piece. A spindle(30) rotatably attaches the blade. A spindle transport device(29) supports the spindle. A work cutting processing part(32) is arranged in a part where the spindle transport device and a work table transport device(26) are orthogonal to each other.
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