METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION,申请号KR20107018825-传众专利搜索

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发明名称	METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION
摘要
申请公布号	KR20100117622(A)	申请公布日期	2010.11.03
申请号	KR20107018825	申请日期	2009.01.20
申请人	TOKYO ELECTRON LIMITED	发明人	KAWAMURA SHIGERU;HAYASHI TERUYUKI
分类号	G01N15/14;G01N21/47;G01N21/71;G01N21/88	主分类号	G01N15/14
代理机构		代理人
主权项
地址

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