Semiconductor device including a MOS transistor and a production method therefor

摘要

It is intended to provide a semiconductor device including a MOS transistor, comprising: a pillar-shaped semiconductor layer (205a,205b); one of drain and source regions which is formed underneath the pillar-shaped semiconductor layer to serve as a first drain/source region (203); a gate electrode (208) formed around a sidewall of the pillar-shaped semiconductor layer through a first dielectric film (207); an epitaxial semiconductor layer formed on top of an upper surface of the pillar-shaped semiconductor layer; and a remaining one of the drain and source regions which is formed so as to be at least partially in the epitaxial semiconductor layer to serve as a second drain/source region (209a,209b), wherein an area of an upper surface of the second drain/source region is greater than an area of the upper surface of the pillar-shaped semiconductor layer.