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发明名称
DETACHABLE SUBSTRATE WITH CONTROLLED MECHANICAL HOLD AND METHOD FOR PRODUCTION THEREOF
摘要
申请公布号
KR100991395(B1)
申请公布日期
2010.11.02
申请号
KR20097017883
申请日期
2002.04.11
申请人
发明人
分类号
H01L21/20;B81C99/00;H01L21/02;H01L21/762;H01L27/12
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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