发明名称 Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD
摘要 A system is provided that includes a device having an emissive portion, a memory, and a dictionary decompressor. The device having an emissive portion is configured to produce a patterned beam. The memory is configured to store a compressed representation of a requested dose pattern, comprising two groups of repeating pattern features, to be formed on a surface by the patterned beam. The dictionary decompressor at least partially decompresses the compressed representation. The dictionary decompressor comprises a first dictionary memory configured to store pattern data corresponding to a first group of the two groups of repeating pattern features and a second dictionary memory configured to store pattern data corresponding to a second group of the two groups of repeating pattern features. The repeating pattern features in the first group have one or more differing characteristics than the repeating pattern features in the second group. Related methods are also provided.
申请公布号 US7826672(B2) 申请公布日期 2010.11.02
申请号 US20090554083 申请日期 2009.09.04
申请人 ASML NETHERLANDS B.V. 发明人 KESSELS LAMBERTUS GERARDUS MARIA;TINNEMANS PATRICIUS ALOYSIUS JACOBUS;VAN ENGELEN REMCO JOHANNES
分类号 G06K9/46;H03M7/00;H04N1/32 主分类号 G06K9/46
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