发明名称 |
Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires |
摘要 |
The method of fabricating semiconducting nanowires having a desired wire diameter includes providing pre-fabricated semiconducting nanowires, at least one pre-fabricated nanowire having a wire diameter larger than the desired wire diameter (d); and reducing the wire diameter of the at least one pre-fabricated nanowire by etching. The etching is induced by light which is absorbed by the at least one pre-fabricated nanowire. The spectrum of the light is chosen such that the absorption of the at least one pre-fabricated nanowire is significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter.
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申请公布号 |
US7825032(B2) |
申请公布日期 |
2010.11.02 |
申请号 |
US20040584037 |
申请日期 |
2004.12.03 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF |
分类号 |
H01L21/302;C01B31/02;G01N33/543 |
主分类号 |
H01L21/302 |
代理机构 |
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地址 |
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