发明名称 Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires
摘要 The method of fabricating semiconducting nanowires having a desired wire diameter includes providing pre-fabricated semiconducting nanowires, at least one pre-fabricated nanowire having a wire diameter larger than the desired wire diameter (d); and reducing the wire diameter of the at least one pre-fabricated nanowire by etching. The etching is induced by light which is absorbed by the at least one pre-fabricated nanowire. The spectrum of the light is chosen such that the absorption of the at least one pre-fabricated nanowire is significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter.
申请公布号 US7825032(B2) 申请公布日期 2010.11.02
申请号 US20040584037 申请日期 2004.12.03
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF
分类号 H01L21/302;C01B31/02;G01N33/543 主分类号 H01L21/302
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