发明名称 |
Structure and method for flexible sensor array |
摘要 |
A method of forming a sensor array. The method includes depositing a source/drain contact layer; depositing a semiconductor layer on the source/drain contact layer; and patterning the source/drain contact layer and the semiconductor layer substantially simultaneously, wherein the patterned semiconductor layer forms part of a sensor of the sensor array.
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申请公布号 |
US7824949(B2) |
申请公布日期 |
2010.11.02 |
申请号 |
US20070963008 |
申请日期 |
2007.12.21 |
申请人 |
PALO ALTO RESEARCH CENTER INCORPORATED |
发明人 |
SAMBANDAN SANJIV;WONG WILLIAM S.;LUJAN RENE A.;LIMB SCOTT J. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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