发明名称 |
Optical sensing in a directional MEMS microphone |
摘要 |
A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
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申请公布号 |
US7826629(B2) |
申请公布日期 |
2010.11.02 |
申请号 |
US20060335137 |
申请日期 |
2006.01.19 |
申请人 |
STATE UNIVERSITY NEW YORK |
发明人 |
MILES RONALD N.;DEGERTEKIN F. LEVENT |
分类号 |
H04R25/00;G01B11/02;G01D5/36;G01H1/00 |
主分类号 |
H04R25/00 |
代理机构 |
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