发明名称 |
HIGHLY CLEAN AND HOT VALVE |
摘要 |
<p>A highly clean and high temperature valve apparatus includes a valve driving unit and a valve casing connected to a bonnet supporting a valve stem slidably. A stem portion has one end positioned in a circumferential wall closed at its two ends by upper and lower covers, and supports one end of the valve stem with its other end extending through the lower cover. The stem portion has its ends supported respectively by first and second bellows for closing an axial through hole of the lower cover tightly. A first pipe communicates with a first space isolated by the first bellows, and a second pipe communicates with a second space isolated by the first bellows. The fluid quantities in the first and second spaces are increased or decreased relative to each other, thereby to drive the stem portion supported in a floating state by the first and second bellows.</p> |
申请公布号 |
KR20100117083(A) |
申请公布日期 |
2010.11.02 |
申请号 |
KR20107018514 |
申请日期 |
2009.01.21 |
申请人 |
HAM-LET MOTOYAMA JAPAN LTD.;TOKYO ELECTRON LIMITED |
发明人 |
CHIBA YASUHIRO;YAMAMOTO KOHEI;TAKADA HIROSHI;KOIZUMI KOTA;YAGI YASUJI;WATANABE SHINGO;ONO YUJI;KANEKO HIROYOSHI;HASEGAWA KOSUKE |
分类号 |
F16K31/126;F16K41/10;F16K49/00;H01L21/027 |
主分类号 |
F16K31/126 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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