发明名称 TOOL, ESPECIALLY CUTTING TOOL AND METHOD FOR THE CVD DEPOSITION OF A TWO PHASE LAYER ON A SUBSTRATE BODY
摘要 The invention relates to a tool, especially a cutting tool, comprising a substrate member onto which at least one layer is deposited by means of CVD, and a method for the chemical vapor deposition of a two-phase layer on a sintered part. According to the invention, the single deposited layer or at least one of the layers is provided with a TiCN phase, TiOCN phase, TiOC phase, or TiC phase and an additional phase consisting of ZrO2 and/or HfO2. CH3CN, C5H5N, or C6H6 is used in the gas atmosphere for producing such a layer in addition to TiC14, HfC14, and/or ZrCl4 and CO2, the remainder being composed of H2 and/or Ar.
申请公布号 CA2524643(C) 申请公布日期 2010.11.02
申请号 CA20042524643 申请日期 2004.04.23
申请人 KENNAMETAL WIDIA GMBH & CO. KG 发明人 SOTTKE, VOLKMAR;WESTPHAL, HARTMUT;VAN DEN BERG, HENDRIKUS
分类号 C23C16/30;C23C30/00 主分类号 C23C16/30
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