发明名称 Driving apparatus
摘要 A driving apparatus (100u) is provided with: a first base portion (110-1); a first stage portion (130-1); a first elastic portion (120-1) which has elasticity to displace the first stage portion in one direction (X axis); a second stage portion (130-2) which is disposed on the first stage portion and on which a driven object (12) is mounted; a second elastic portion (120-2) which has elasticity to displace the second stage portion in other direction (Y axis); a first applying device (141, 142, 143, 22) for applying a first excitation force for displacing the first stage portion such that the first stage portion is resonated in the one direction at a resonance frequency determined by the first stage portion and the first elastic portion; and a second applying device (161, 162, 22) for applying a second excitation force for displacing the second stage portion at a phase shifted by approximately 90 degrees from a phase of the displacement of the first stage portion such that the second stage portion is resonated in the other direction at a resonance frequency determined by the second stage portion and the second elastic portion.
申请公布号 US7825565(B2) 申请公布日期 2010.11.02
申请号 US20070532938 申请日期 2007.03.30
申请人 PIONEER CORPORATION 发明人 SUZUKI JUN
分类号 H01L41/08 主分类号 H01L41/08
代理机构 代理人
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