| 摘要 |
<p>PURPOSE: A liquid-vapor inversion aerosol deposition method and an apparatus thereof are provided to manufacture a nanoparticle coated film, a carbon nanotube coated film, and a graphene coating film by directly forming an aerosol with micro droplets dispersed with material powder. CONSTITUTION: A liquid-vapor inversion aerosol deposition method comprises the following steps: spraying micro droplets dispersed with material powder; heating the sprayed micro droplets to form an aerosol; and spraying the aerosol to deposit to a substrate. A liquid-vapor inversion aerosol deposition apparatus includes a micro nozzle spraying the micro droplets, a heating chamber forming the aerosol, a spray nozzle spraying the aerosol inside the heating chamber, and a deposition chamber including the substrate in the inside.</p> |
