| 摘要 |
<p>PURPOSE: A galvanometer correcting device is provided to accurately correct an error by directly measuring an irradiation position of a laser beam. CONSTITUTION: A PSD(Position Sensing Device) sensor(900) is mounted on a reference position of a stage and measures the irradiation position of a laser beam. A driving controller(800) controls the operation of a galvanometer to control the irradiation position of the laser beam according to the calculated difference by comparing the reference position with the measurement position of the laser beam measured by the PSD sensor.</p> |
