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发明名称
METALLIC SPUTTERING TARGET MATERIAL
摘要
申请公布号
KR20100116213(A)
申请公布日期
2010.10.29
申请号
KR20107020641
申请日期
2009.02.27
申请人
NIPPON STEEL MATERIALS CO., LTD.
发明人
INAGUMA TORU;SAKAMOTO HIROAKI;ANDO AKIRO;OISHI TADAMI;IZUMI SHINGO;NAKAMURA HAJIME
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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