发明名称 |
WAFER CARRIER WITH HUB |
摘要 |
<p>A wafer carrier for a rotating disc CVD reactor includes a unitary plate of a ceramic such as silicon carbide defining wafer-holding features such as pockets on its upstream surface and also includes a hub removably mounted to the plate in a central region of the plate. The hub provides a secure connection to the spindle of the reactor without imposing concentrated stresses on the ceramic plate. The hub can be removed during cleaning of the plate.</p> |
申请公布号 |
KR20100116169(A) |
申请公布日期 |
2010.10.29 |
申请号 |
KR20107012860 |
申请日期 |
2008.12.01 |
申请人 |
VEECO INSTRUMENTS INC. |
发明人 |
BOGUSLAVSKIY VADIM;GURARY ALEXANDER I.;MOY KENG;ARMOUR ERIC A. |
分类号 |
H01L21/673;H01L21/205;H01L21/677;H01L21/683 |
主分类号 |
H01L21/673 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|