| 摘要 |
<p>PURPOSE: An apparatus and a method for manufacturing a bulk silicon solar cell are provided to improve the efficiency of a manufacturing process by forming a P-N junction layer through a dopant implantation operation. CONSTITUTION: A low vacuum chamber comprises a boat stage. A heater(52) is installed on the external wall of the chamber. A plurality of wafers(42) with a pre-set interval is loaded on a boat. A dopant gas supply pipe(72) sprays third group or fifth group coating gas onto the surface of the wafers. A gas diffuser(70) sprays silicon deposition gas. A baffle(80) uniformly sprays the gas from the diffuser.</p> |
