SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD,申请号KR20080113300-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	KR100991086(B1)	申请公布日期	2010.10.29
申请号	KR20080113300	申请日期	2008.11.14
申请人		发明人
分类号	H01L21/027;G02F1/13	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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