METHOD OF FORMING PELICLE MEMBRANE USING SUBSTRATE HAVING REALISING LAYER

摘要

PURPOSE: A method for manufacturing pellicle membrane using a substrate having a release film is provided to manufacture a thin film without the use of an expensive substrate such as a quartz glass, since a release film does not react with pellicle film formation solution. CONSTITUTION: A method for manufacturing pellicle membrane using a substrate having a release film comprises following steps. A release film is formed on a substrate. Organic solution for pellicle film formation is applied, dried, and peeled off on the release film. The release film does not chemically react to organic solution for pellicle film formation. Adhesion strength between the substrate and the release film is stronger than the adhesion strength of the pellicle film.