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发明名称
COMPOUND, METHOD FOR PRODUCING SAME, POSITIVE RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
摘要
申请公布号
KR100990353(B1)
申请公布日期
2010.10.29
申请号
KR20087006532
申请日期
2006.09.13
申请人
发明人
分类号
C07C69/734;C07C51/09;C07C59/72;G03F7/039
主分类号
C07C69/734
代理机构
代理人
主权项
地址
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