| 摘要 |
PURPOSE: A beam homogenizing method for a laser lift off machine and an apparatus of the same are provided to prevent the crystal structure of a light emitting diode from being damaged. CONSTITUTION: The beam-eliminating ratio distribution of a beam blocking unit is matched with the energy distribution of the beam to be eliminated. The beam blocking unit is a reflecting plate or an absorbing plate. The reflectivity of the reflecting plate is determined by the shape or the number of reflective coating layers of the reflecting plate. The absorbancy of the absorbing plate is determined by the thickness of the absorbing plate.
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