METHOD OF MANUFACTURING DISSOLVED OXYGEN-REMOVED WATER, APPARATUS FOR MANUFACTURING DISSOLVED OXYGEN-REMOVED WATER, DISSOLVED OXYGEN TREATMENT TANK, METHOD OF MANUFACTURING ULTRAPURE WATER, METHOD OF MANUFACTURING HYDROGEN DISSOLVED WATER, APPARATUS FOR MANUFACTURING HYDROGEN DISSOLVED WATER, AND METHOD OF CLEANING ELECTRONIC COMPONENTS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing dissolved oxygen-removed water by efficiently removing dissolved oxygen in water to be treated without requiring a large-size catalyst tower even when causing water to pass through the tower with such a large water passage velocity (SV) exceeding 2,000 h-1and thinning a packed bed height of catalyst.

SOLUTION: In the method of manufacturing dissolved oxygen-removed water, hydrogen is dissolved into oxygen-dissolved water, and thereafter, the oxygen-dissolved water into which hydrogen has been dissolved is brought into contact with a platinum group metal carrier catalyst prepared by carrying platinum group metal to a monolith organic porous anion exchanger.

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