| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device capable of mounting a large article to be driven and performing stable operations. <P>SOLUTION: The stage device for driving an article to be driven has: a slider 3; a guide 2 having a surface 2a parallel to a Z-axis direction; a bearing unit 10 having a bearing 12 as a hydrostatic bearing to facilitate the movement of the guide 2 in the Z-axis direction for the surface 2a and a protrusion 14 having a surface 14a protruding from an outer surface 11b opposite to the guide 2 and forming a part of a sphere or cylindrical surface; and a bearing unit 20 having a bearing 22 for facilitating the movement in the rotation direction around the any axis of X, Y and Z for the surface 14a of the protrusion 14, and fixed to the slider 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |
