| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress diffuse reflection of incident light upward by a sidewall of multilayer wiring. <P>SOLUTION: A sidewall surface of at least one of a plurality of wiring layers 115, 117 and 119 is formed in a reverse tapered shape which is longer at an upper part as an incident side for light than at a lower part as a reception side for the light in the incident direction of the light incident from above the plurality of wiring layers 115, 116 and 117. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
