| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic rotary working machine with high working accuracy and reliability. SOLUTION: Voltage for exciting ultrasonic vibration of a desired vibration mode on a rotary tool 6 is applied to a cylindrical piezoelectric ceramic 12 joined with the rotary tool 6 to ultrasonically vibrate the rotary tool 6. To prevent the ultrasonic vibration from propagating to other than the rotary tool 6 to the extent possible, a tool holder 9 for carrying the rotary tool 6 is structured to prevent the ultrasonic vibration of the rotary tool 6 from propagating. To do so, numerous holes are made on the tool holder 9, and effects of the holes cause the ultrasonic vibration from the rotary tool 6 to be reflected or refracted, and the vibration to be propagated to a chucking device is reduced. Therefore, the ultrasonic vibration can be efficiently excited on the rotary tool 6. COPYRIGHT: (C)2011,JPO&INPIT
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