PIEZOELECTRIC THIN FILM AND MANUFACTURING METHOD THEREFOR, INKJET HEAD, METHOD FOR FORMING IMAGES USING AN INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR MEASURING ANGULAR VELOCITY USING AN ANGULAR VELOCITY SENSOR, PIEZOELECTRIC ELEMENT, AND METHOD

摘要

Provided is a piezoelectric thin film that contains a lead-free ferroelectric material and has high piezoelectric performance comparable to lead zirconate titanate (PZT). Also provided is a manufacturing method for said piezoelectric thin film. The piezoelectric thin film is provided with a (001)-oriented LaNiO3 film, a (001)-oriented NaNbO3 film, and a (001)-oriented (Bi, Na, Ba)TiO3 film, layered in that order.