| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of solar cells capable of manufacturing an integrated thin-film solar cell with a fixed trench width, improved yield and improved machining quality. <P>SOLUTION: The manufacturing apparatus of integrated thin-film solar cells includes a support means for supporting a thin-film solar cell substrate W, a scribe head 7 for holding a tool 8 for machining trenches via a means for applying pressure, and a moving means for moving the substrate W and the scribe head 7 relative to each other, and the means for applying pressure is formed by a voice coil motor 30 such that the amount of current to the motor is controlled by a control section S. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
