| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck that has a large attractive force and a short detachment time, hardly suffers from warping during manufacturing, and reduced in deterioration in mechanical strength after a heat cycle. <P>SOLUTION: A ceramic electrostatic chuck includes an embedded electrostatic electrode. The electrostatic chuck includes a dielectric layer and a support layer that is in contact with the back side of the dielectric layer. A wafer can be placed on the surface of the dielectric layer. The dielectric layer is formed of a sintered aluminum nitride containing Sm, and has volume resistivity in a range of 4×10<SP>9</SP>-4×10<SP>10</SP>Ωcm at room temperature. The support layer is formed of a sintered aluminum nitride containing Sm and Ce, and has a volume resistivity of 1×10<SP>13</SP>Ωcm or higher at room temperature. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
