发明名称 METHOD OF FABRICATING A NANO/MICRO STRUCTURE
摘要 A method of fabricating a nano/micro structure comprising the following steps is provided. First, a film is provided and then a mixed material comprising a plurality of ball-shape particles and a filler among the ball-shape particles is formed on the film. Next, the ball-shape particles are removed by the etching process, the solvent extraction process or the like, such that a plurality of concaves is formed on the surface of the filler, which serves as a nano/micro structure of the film.
申请公布号 US2010273331(A1) 申请公布日期 2010.10.28
申请号 US20100831265 申请日期 2010.07.07
申请人 NATIONAL CENTRAL UNIVERSITY 发明人 CHAN CHIA-HUA;CHYI JEN-INN;PAN CHANG-CHI;CHEN CHII-CHANG
分类号 H01L21/302 主分类号 H01L21/302
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