| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a multi-layer ceramic substrate for preventing the generation of the defect or failure of the periphery of a via conductor by using a contraction control sheet. SOLUTION: An intermediate green sheet 23 composed in the same way as a ceramic green sheet 11 is formed between the ceramic green sheet 11 and a contraction control sheet 31 so that the surface of an inter-layer conductor formation part 15 of the outermost layer ceramic green sheet is covered. Therefore, it is possible to suppress glass components in the periphery of the inter-layer conductor formation part 15 (via conductor before sintering) from moving to the contraction control sheet 31 side according to the existence of the glass components of the intermediate green sheet 23 in sintering. Thus, it is possible to prevent the generation of any defect or failure in the periphery of the via conductor after sintering. COPYRIGHT: (C)2011,JPO&INPIT |
