Device for monitoring plasma, has carrier layer and indicator layer placed on carrier layer, where indicator layer is made of material etched by influence of plasma on indicator layer

摘要

The device has a carrier layer (20) made of ceramic material or plastic and an indicator layer (21) placed on the carrier layer. The indicator layer is made of a material etched by the influence of the plasma (4) on the indicator layer. The material of the carrier layer is different from the material of the indicator layer in terms of color. The indicator layer is made of carbon, a plasma polymer e.g. acetylene, a paint, a differential leukocyte count-layer or a dye layer e.g. eosin, methylene blue, food colorant, ultraviolet dye or Blankophor(RTM: Fluorescent whitening agents). An independent claim is also included for a method for execution of a plasma monitoring device.