APPARATUS FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, METHOD FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, AND ALUMINUM NITRIDE SINGLE CRYSTAL

摘要

An apparatus for manufacturing an aluminum nitride single crystal is provided with a crucible which contains inside thereof an aluminum nitride raw material and a seed crystal disposed to face the aluminum nitride raw material. The crucible is composed of: an inner crucible, which contains inside thereof the aluminum nitride raw material and the seed crystal, is anti-corrosive to the sublimed gas of the aluminum nitride raw material and is formed of a metal having an ion radius larger than that of aluminum or a nitride of such metal; and an outer crucible which covers the inner crucible and is formed of a boron nitride.