EINRICHTUNG UND VERFAHREN ZUM AUFBRINGEN EINER GLEICHMÄSSIGEN, DÜNNEN FLÜSSIGKEITSSCHICHT AUF SUBSTRATE

摘要

The coating machine (10) has a transport system (13) consisting of a conveyer belt (29). It carries silicon substrates (12) into a hood (41) in which they are exposed to a mist (15) of phosphoric acid. An ultrasonic generator (11) in the supply hopper (14) has a piezoelectric element and a quartz glass nozzle (68) drawing in liquid and projecting just above the liquid surface (20). The mist goes down a shaft (25) to the hood, and is sucked out of the end of the hood through a woven plastics layer (45) into a suction chamber (43) by a pump (48). An overflow arrangement (52-57) moves overflow liquid to a holding tank (19).