发明名称 SEMICONDUCOTOR MEMORY DEVICE HAVING FLOATING BODY CAPACITOR AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: The semiconductor memory device and the manufacturing method thereof equipped with the floating body capacitor. The accumulated hole layer can be controlled easily. Therefore, the Chung of the electric charge, and discharge facilitates. CONSTITUTION: The semiconductor memory device and the manufacturing method thereof equipped with the floating body capacitor. The SOI substrate(100), element isolation film, transistor, capacitor, contact plug is included. The Base substrate(110) including the conductive well(120), and the buried oxide and device forming layer are laminated in the surface and the SOI substrate is composed.
申请公布号 KR20100115721(A) 申请公布日期 2010.10.28
申请号 KR20100096260 申请日期 2010.10.04
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, JONG SU
分类号 H01L27/108;H01L21/8242;H01L27/10 主分类号 H01L27/108
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