发明名称 INSTALLATION METHOD AND REMOVING METHOD OF DISCHARGE LAMP
摘要 <P>PROBLEM TO BE SOLVED: To carry out installation or removal of a discharge lamp on or from a holding mechanism easily and in a short time. <P>SOLUTION: As for the installation method of a discharge lamp, a discharge lamp 1 is prepared which has a glass tube 25 and a base portion 26, in which the base portion 26 has a flange part 26a, an axis part 26b of which outline is smaller than the flange part 26a, a recessed part 26f of which outline is smaller than the axis part 26b, a fixing part 26h of which outline is smaller than the flange part 26a and larger than the recessed part 26f, and a passage which is installed on the outer circumferential face of the axis part 26b; the base portion 26 of the discharge lamp 1 is inserted into an opening of an installation device 31; and the supply port provided in the installation device 31 and the passage of the axis part 26b are made to mutually face each other in order to supply a cooling medium. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010245048(A) 申请公布日期 2010.10.28
申请号 JP20100123638 申请日期 2010.05.29
申请人 NIKON CORP 发明人 SHIRASU HIROSHI;AOKI YASUO;KOYAMA MOTOO;KIKUCHI TAKAYUKI
分类号 H01J5/50;G03F7/20;H01J61/52;H01L21/027 主分类号 H01J5/50
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