| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorine gas generation device capable of stably supplying a fluorine gas to an external device. SOLUTION: In the fluorine gas generation device provided with purification devices 16 that remove hydrogen fluoride gas mixed in a primary product fluorine gas that vaporizes from a molten salt and is generated at an anode 7, at least two purification devices 16 are arranged in parallel, and are provided with gas inflow sections 61a into which the primary product fluorine gas, containing hydrogen fluoride gas, flows and cooling devices 70a that cool the gas inflow sections 61a so that the hydrogen fluoride gas mixed in the primary product fluorine gas solidifies while fluorine gas passes through the gas inflow sections 61a, on the basis of detection results from an accumulation detector 86a that detects the accumulation state of hydrogen fluoride in the gas inflow sections 61a, a control device switches over from one purification device 16 to the other, so that fluorine gas is directed to the purification device 16 that had been on standby, while hydrogen fluoride is discharged from the gas inflow section 61a of the purification device 16 that is stopped by the switchover, and fluorine gas is provided to the gas inflow section 61a thereof, thereby putting the stopped purification device 16 in a standby state. COPYRIGHT: (C)2011,JPO&INPIT |
