| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate inspection method capable of precisely inspecting wiring even when there is variation in width, thickness, or electric resistivity of the wiring due to the history of production processes. SOLUTION: The substrate inspection method for determining the quality of the wiring formed on a substrate to be inspected includes: supplying a current to two reference wirings having different widths preset in the substrate to measure respective voltages; calculating thickness information and/or electric resistivity information on the two reference wirings, respectively, on the basis of the current value and the voltage value; and determining the quality of the wiring to be inspected on the basis of the thickness information or the electric resistivity information. COPYRIGHT: (C)2011,JPO&INPIT
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