| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle substrate which is little damaged even when the static electricity of an electrified material to be printed is ejected to the nozzle substrate. SOLUTION: The nozzle substrate 1 made of silicon includes a nozzle hole 10 passing through the nozzle substrate 1 and a liquid droplet protecting film 11 being continuous from the liquid droplet ejection surface 1a of the nozzle substrate 1 to the inwall of the nozzle hole 10. The specific resistance of the nozzle substrate 1 is 100-2,000 Ωcm and a water repellent film 12 is formed on the liquid droplet ejection surface 1a of the nozzle substrate 1. COPYRIGHT: (C)2011,JPO&INPIT
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