| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating probe head structure probe card, including a probe head having a function of self-controlling the degree of parallel like a wafer; and preventing the periphery of the probe head from being contacted with the wafer. SOLUTION: The floating probe head structure probe card 1 includes: a probe head 5 disposed between a tester 4 and a semiconductor device 31 to provide electric connection therebetween, the tester 4 performing an operation test by connecting the semiconductor device 31 formed on the wafer 3 with an LSI tester; a spiral contact 2' formed in the semiconductor device 31 side of the probe head 5 as an electrode 2' corresponding to the arrangement of an electrode 32 of the semiconductor device 31; a land 52 formed in the tester 4 side as an electrode 52 corresponding to arrangement of an electrode 2 of the tester 4; and a spacer 51, formed of an elastomer, positioned in the semiconductor device 31 side of the probe head 5 and positioned corresponding to the length and width of a dicing area 33. COPYRIGHT: (C)2011,JPO&INPIT
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