| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production control device allowing efficient inspection of a plurality of reticles used in a plurality of exposing devices inside a production line 1. <P>SOLUTION: This production control device 1 controlling the inspection to the plurality of reticles used in exposing processing in the exposing devices belonging to the production line wherein a plurality of lots progress includes: a reticle information collection part 6 acquiring an integrated value of an exposing amount irradiated on the reticle in the exposing processing; an inspection candidate reticle extraction part 7 comparing the acquired integrated exposing amount of the reticle and a reference value set to be less than a continuation use upper limit exposing amount of the reticle to extract the reticle that is an inspection candidate; a disuse scheduled period calculation part 9 calculating a period except a use scheduled period wherein the extracted inspection candidate reticle is used in the exposing processing of the lot in process as a disuse scheduled period; and a reticle inspection plan execution part 10 making an inspection device execute the inspection of the extracted inspection candidate reticle within the calculated disuse scheduled period. <P>COPYRIGHT: (C)2011,JPO&INPIT |
