| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner that minimizes an error depending upon the shape of a scale when a substrate stage is positioned using a position measuring device such as an encoder. <P>SOLUTION: The aligner 50 includes the substrate stage 6 for holding a substrate 5, an optical measurement unit 7 which measures the position of the substrate stage 6, and the scale 8 as a target of reflection for measurement light from the optical measurement unit 7, and further includes a supply system which supplies temperature control air for controlling the temperature in the space where the substrate stage 6 is installed and an exhaust system which exhausts it, and the supply system includes a first supply system 11 which supplies the temperature control air to a periphery of a scanning part of the substrate stage, an exhaust system 14, a second supply system 13 which supplies the temperature control air to a periphery of an installation part of the scale 8, and an exhaust system 15. <P>COPYRIGHT: (C)2011,JPO&INPIT |
