| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid-ejecting head with improved displacement characteristics of a piezoelectric element, a liquid-ejecting apparatus, and an actuator. <P>SOLUTION: The liquid-ejecting head includes a flow-passage-forming substrate 10 that includes a pressure-generating chamber in communication with a nozzle 21 and a piezoelectric element 300 which alters the internal pressure of the pressure-generating chamber. The piezoelectric element 300 includes a piezoelectric layer 70 containing titanium (Ti) and zirconium (Zr), a first electrode 60, and a second electrode 80. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer 70. The composition ratio Ti/(Zr+Ti) of the piezoelectric layer 70 is 0.40 or more and less than 0.50. At least a portion of the piezoelectric layer 70 formed on the first electrode 60 contains tetragonal crystals formed through phase transition under stress caused by an underlying layer. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
