| 摘要 |
PROBLEM TO BE SOLVED: To reduce a quantity of hydrogen entering a composition member of a gas pressure sensor by accompanying detection of a hydrogen pressure in the gas pressure sensor for detecting the pressure of a gas. SOLUTION: A detection base material 10 includes a cylindrical part 20, and a detection wall 22 covering an opening of one end of the cylindrical part 20. The detection base material 10 makes a container shape regarding the cylindrical part 20 as a circumstance sidewall and regarding a detection wall 22 as a bottom wall, and the container shape insidewall face forms a pressure receiving hole 26. The gas pressure sensor is fixed on gas piping so that an opening of the detection base material 10 is matched with an opening provided on the gas piping. A semiconductor strain gage 16 is fixed on the outsidewall face of the sensor of the detection wall 22 through an adhesion glass layer 12. A plurality of glass layer holes 14 penetrating between the face of the side of the detection wall 22 and the face of the side of the semiconductor strain gage 16 are opened in the adhesion glass layer 12. COPYRIGHT: (C)2011,JPO&INPIT
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