LIQUID DROPLET DELIVERING HEAD, LIQUID DROPLET DELIVERING APPARATUS, AND METHOD FOR MANUFACTURING NOZZLE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a liquid droplet delivering head capable of detecting dot dropping easily and at real time in the liquid droplet delivering head, a liquid droplet delivering apparatus and a method for manufacturing a nozzle substrate. SOLUTION: The liquid droplet delivering head 100 includes: a nozzle substrate 1 having a plurality of nozzle holes 10 for delivering liquid droplets with electrical conductivity and a pair of conductive electrodes 12 for detecting delivery formed on the edges of respective nozzle holes 10; a cavity substrate 2 in which a bottom wall constitutes a vibrating plate 23 and has a plurality of cavities 10 communicated with the nozzle holes 10 and storing the liquid droplets; an electrode substrate 3 having individual electrodes 31; and a delivery detecting circuit 42 connected with a pair of the conductive electrodes 12 for detecting delivery and loading an electric voltage thereon. Quality of a liquid droplet delivering condition can be detected by bringing the liquid droplets delivered from the nozzle holes 10 into contact with the conductive electrodes 12 for detecting delivery. COPYRIGHT: (C)2011,JPO&INPIT