发明名称 GUIDING DEVICES AND METHODS FOR CONTACTLESS GUIDING OF A WEB IN A WEB COATING PROCESS
摘要 According to embodiments described herein, a guiding device for contactless guiding of a web in a web coating process application under vacuum conditions is provided. The guiding device includes a curved surface for facing the web, and a group of gas outlets disposed in the curved surface and adapted for giving off a gas flow to form a hover cushion between the curved surface and the web. The guiding device further includes a gas distribution system for selectively providing the gas flow to a first subgroup of the gas outlets and for preventing the gas from flowing to a second subgroup of the gas outlets. The curved surface comprises a web guiding region. The first subgroup of the gas outlets consists of at least one gas outlet in the web guiding region. The second subgroup of gas outlets consists of at least one gas outlet outside of the web guiding region in the web guiding direction.
申请公布号 WO2010122030(A2) 申请公布日期 2010.10.28
申请号 WO2010EP55212 申请日期 2010.04.20
申请人 APPLIED MATERIALS, INC.;HEIN, STEFAN;HERZOG, ANDRE;SKUK, PETER;BUSCH, JOHN D. 发明人 HEIN, STEFAN;HERZOG, ANDRE;SKUK, PETER;BUSCH, JOHN D.
分类号 B65H23/32;B65H23/24;B65H27/00 主分类号 B65H23/32
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