| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical member that excels, without impairing antirflection properties, is suppressed in the sticking of stain and dust and is hard to be scratched, or to provide a manufacturing method capable of forming the optical member. <P>SOLUTION: The optical member is provided with a substoichiometrically oxidized titanium film formed by vapor deposition of substoichiometrically oxidized titanium in a vacuum chamber, into which oxygen gas for adjusting the degree of the vacuum is introduced. The relation between a pressure p(Pa) within the vacuum chamber, when forming the film and the optical film thickness (refractive index is 2.50 and center wavelength of design is 500 nm) of the substoichiometrically oxidized titanium film, is (1) p≥0.005, (2) the optical film thickness ≤0.500λ and (3) the optical film thickness ≥(0.001exp(905.73p)-0.050)λ, where exp is the exponential function, with base e of the natural logarithm as the base. <P>COPYRIGHT: (C)2011,JPO&INPIT |
