| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To carry out scribing while optimizing the power of a laser beam. <P>SOLUTION: A solar panel is coated with a silicon dioxide (SiO<SB>2</SB>) film between a glass substrate and a transparent electrode layer so as to prevent such a problem that a metal film is corroded by sodium precipitating from a glass substrate and this accelerates deterioration of the solar panel. When the transparent electrode layer is subjected to scribing by use of a laser beam on the glass substrate, the silicon dioxide film is possibly scratched to cause precipitation of sodium from the glass substrate. Therefore, a machining portion of the workpiece is irradiated with an electron beam by using an energy dispersion type X-ray analyzing means, and characteristic X-rays generated by the irradiation are detected to measure the value of a sodium component. When the sodium component value is larger than a predetermined value, this means an excess power of the laser beam, so the power of the laser beam is appropriately adjusted so that the sodium component value is not detected. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
