METHOD OF MANUFACTURING ACTIVE-MATRIX SUBSTRATE, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing the active-matrix substrate and that of an organic light-emitting display. SOLUTION: The method of manufacturing the active-matrix substrate and that of the organic light-emitting display include: a step of forming on a substrate a first electrode patterned with a first pattern; a step of forming on the substrate a first insulating film to cover the first electrode; a step of disposing on the first insulating film a semiconductor wafer with a first layer formed on one surface to firmly attach the first layer to the first insulating film; a step of transcribing the first layer on the first insulating film to form the semiconductor layer on the first insulating film; a step of doping and patterning impurities in a part of the semiconductor layer to form an active layer; a step of forming a second insulating layer on the first insulating layer so as to cover the active layer; and a step of forming a second electrode, on the second insulating film, electrically connected to a region doped by the impurities in the active layer. COPYRIGHT: (C)2011,JPO&INPIT