SUCKING AND HOLDING APPARATUS, SUCKING AND HOLDING METHOD, TRANSPORTING APPARATUS, AND TRANSPORTING METHOD

摘要

A sucking and holding apparatus configured to suck and hold an object to be held by a negative pressure generating at a center portion of a swirling flow of gas generated in a swirling flow generating chamber and the gas flowing out from an end of the swirling flow generating chamber sideward, includes: a sucking and holding terminal having the swirling flow generating chamber and a sucking and holding surface having an opened suction blow-out port of the swirling flow generating chamber; an urging unit configured to apply an urging force in the direction substantially parallel to the sucking and holding surface to the object to be held located at a position which allows the same to be sucked and held by the sucking and holding terminal; and a locking unit configured to lock the object to be held against the urging force applied by the urging unit.